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    首頁> 外文會議>Unmanned/Unattended Sensors and Sensor Networks II >Chemicapacitive microsensors for detection of explosives and TICs
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    Chemicapacitive microsensors for detection of explosives and TICs

    機譯:用于檢測爆炸物和TIC的化學相容性微傳感器

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    Seacoast Science develops chemical sensors that use polymer-coated micromachined capacitors to measure the dielectric permittivity of an array of selectively absorbing materials. We present recent results demonstrating the sensor technology's capability to detect components in explosives and toxic industrial chemicals. These target chemicals are detected with functionalized polymers or network materials, chosen for their ability to adsorb chemicals. When exposed to vapors or gases, the permittivity of these sorbent materials changes depending on the strength of the vapor-sorbent interaction. Sensor arrays made of ten microcapacitors on a single chip have been previously shown to detect vapors of organic compounds (chemical warfare agents, industrial solvents, fuels) and inorganic gases (SO_2, CO_2, NO_2). Two silicon microcapacitor structures were used, one with parallel electrode plates and the other with interdigitated "finger-like" electrodes. The parallel-plates were approximately 300 μm wide and separated by 750 nm. The interdigitated electrodes were approximately 400 μm long and were elevated above the substrate to provide faster vapor access. Eight to sixteen of these capacitors are fabricated on chips that are 5 x 2 mm and are packaged in less than 50 cm~3 with supporting electronics and batteries, all weighing less than 500 grams. The capacitors can be individually coated with different materials creating a small electronic nose that produces different selectivity patterns in response to different chemicals. The resulting system's compact size, low-power consumption and low manufacturing costs make the technology ideal for integration into various systems for numerous applications.
    機譯:Seacoast Science開發了化學傳感器,該傳感器使用涂覆了聚合物的微機械電容器來測量一系列選擇性吸收材料的介電常數。我們提供的最新結果證明了傳感器技術能夠檢測炸藥和有毒工業化學品中的成分。這些目標化學物質可通過功能化聚合物或網絡材料進行檢測,并根據其吸附化學物質的能力進行選擇。當暴露于蒸汽或氣體中時,這些吸附劑材料的介電常數會根據蒸汽-吸附劑相互作用的強度而變化。先前已顯示在單個芯片上由十個微電容器組成的傳感器陣列可檢測有機化合物(化學戰劑,工業溶劑,燃料)和無機氣體(SO_2,CO_2,NO_2)的蒸氣。使用了兩種硅微電容器結構,一種具有平行的電極板,另一種具有相互交叉的“手指狀”電極。平行板的寬度約為300μm,相隔750 nm。叉指電極的長度約為400μm,并升高到基板上方,以提供更快的蒸汽通道。這些電容器中的八到十六個是在5 x 2 mm的芯片上制造的,并且與支持電子設備和電池一起包裝在小于50 cm?3的范圍內,所有電容器的重量都小于500克。電容器可以分別涂有不同的材料,從而形成一個小的電子鼻,以響應不同的化學物質而產生不同的選擇性模式。最終系統的緊湊尺寸,低功耗和低制造成本使該技術成為集成到眾多應用中的各種系統的理想選擇。

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